Semiconductors are high-end manufacturing processes, and high-purity silicon is the most important basic material for microelectronic components such as integrated circuits, microprocessors, and memory chips. Chemical pumps are used in semiconductor scenarios mainly to transport corrosive chemicals, process water and wastewater. Throughout the manufacturing process, harsh chemicals such as hydrogen peroxide and hydrochloric acid are used to clean semiconductors.

QEEHUA Pumps’ fluorine lined magnetic pumps with high density PFA and CFRETFE have strong corrosion resistant properties to ensure a long service life. Corrosion-resistant pumps are at the heart of semiconductor manufacturing and depend on long and stable operation. Therefore, these chemical pumps must be robust in appearance and reliable in terms of fluid connection material. Any triggered downtime can stop production and cause significant damage.

The simple, low-maintenance design of magnetic drive centrifugal pumps provides the performance required for semiconductor manufacturing. QEEHUA Pumps offers a wide range of industrial pumps guaranteed to meet your needs. Contact us and our team of experts will work with you to provide the best choice of pump for your semiconductor application.

Semiconductor process flow in focus.

Monocrystalline wafer cleaning and etching.
Wet development, spray etching, and leaching processes.
Central Chemical Dispensing System (CDS)

QEEHUA PUMP series commonly used in the semiconductor industry

Fluorine lined magnetic pump is a new type of pump which applies modern magnetism principle and uses magnetic drive of permanent magnet to realize contactless transmission of torque. All the overflow parts are made of fluorine plastic and can convey corrosive media such as acid, alkali and oxidizer of any concentration (strength).

Pneumatic diaphragm pump is a new type of conveying machinery, using compressed air as the power source, for a variety of corrosive liquids can be used.

Metering pump is a special kind of volumetric pump that can meet the needs of various strict processes, the flow rate can be step Lessly adjusted in the range of 0-100%, used to transport liquids (especially corrosive liquids) a special kind of volumetric pump. Metering pump belongs to reciprocating volumetric pump for precise metering.

Chemical liquid filter is generally used in the industrial production process, acidic and alkaline solution solid-liquid filtration and separation use. It is generally made of PP/PVDF/PVC plastic injection, and can be used to filter a variety of chemical liquids.